UHV LEAKVALVE - TECHNICAL DATA

Material housing
Material diaphragm
Material outside of vacuum

Lifetime

Mounting position

Weights:
   handoperated CF 16/16
   handoperated CF 35/16
   handoperated VCR
   motor driven
   pneumatically operated NC

Internal pressure
Pressure difference

Baking temperatures:
   Valve open
   Valve closed or operable

Tightness housing
Tightness valve seat

Dead volumes:
   Main flange side
   Side flange side

Turns of the handwheel

Operating time motor driven

Compressed air pneumatic cylinder

316L
316L, gold plated
304, protected steel

100,000 cycles until first service

any

1,6 kg
2,2 kg
1,5 kg
+ 2,3 kg
+ 8,6 kg

Vacuum to 10 bar
10 bar from each side

450°C
300°C

1.10 E-10 mbar.l/s
1.10 E-10 mbar.l/s

1,0 - 1,4 ccm
4,6 ccm

10

10 seconds for the whole range

4 - 9 bar overpressure

LEAKDIAGRAM:

In the range of turn 0 - 3 the diaphragm does not touch the valve seat. Due to physical reasons, control between 10 E-9 und 10 E-10 is not possible, if used at room temperature (red range in the diagram). In this case the valve is tight approx at turn 9 to 10. Control in this range is possible if the valve is heated.

Maximum throughput: 60 mbar.l/s

Subject to change